POLOS 200
| Type |
Desktop type w/ Keyboard |
| Main
Unit
|
Chamber |
NPP(Standard)or PTFE(Optional) |
| Inside lid |
Anti-splash function |
| Lid |
Clear glass w/ 19mm center hole |
| Holder |
Details are described in this page |
| Wafer size |
From chip size up to 12" |
| Rpm |
1~6,000rpm(optionally up to 10,000rpm?Non-vacuum type chuck supports up to3,000rpm) |
| Acceleration |
0~2,000rpm/sec |
| Spin accuracy |
±1rpm |
| Power |
100-120VAC?50/60Hz?2.5A |
| Power consumption |
500W(max) |
| Controller |
Sequence |
memory up to 50programs |
| Program:99step/program |
| Step time:999sec/step |
| Interlock |
Vacuum absorption |
| Lid open/close |
|
* Specification may change without notice.
|
| Actuation |
High speed motor |
| Main unit |
Change to TeFlon |
| Various chucks |
Vacuum chuck, Vacuum chuck w/hook, Chip holder,etc (various sizes) |
| Others |
Centering tool (various sizes) |
|
 Mountable OEM model is also available. Possible to customize for wet bench, etc.
Ask for details and customization.
|
|
|