Spectral Analysis System (ORIEL)
CornerstoneTM 130 1/8 Motorized
Monochromator UV VIS
PicoAmperimeter System
(KEITHLEY)
PicoAmperimeter / Volt. Source
GPIB Board
Deposition
Techniques
Sputtering
Thermal Evaporation
CVD deposition system (at Dept.
Physiscs)
Etching
Silicon Bulk Micromachining
Other Equipments
Wire-bonding system
Mask aligner
Wafer-probe station
RF measurement setup (spectrum analyzer, network analyzer)
Anechoic chamber 900MHz-9GHZ
Dicer for wafers
SU-8 deposition system
Wafer wet benche
Assembly line for SMDs
Gases system (O, N, Ar)
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